TY - GEN
T1 - Nanostructured gas sensors by electron beam evaporation
AU - Wongchoosuk, Chatchawal
AU - Wisitsoraat, Anurat
AU - Tuantranont, Adisorn
AU - Kerdcharoen, Teerakiat
PY - 2011
Y1 - 2011
N2 - Electron beam (E-beam) evaporation process offers extensive possibilities for controlling film structure and morphology with desired properties such as dense coating, high thermal efficiency, low contamination, high reliability and high productivity. In this work, we have applied the E-beam process to fabricate nanostructured gas sensors, i.e., WO3, SnO2, CNT-WO 3, CNT-SnO2. The nanostructure sensing elements were characterized by scanning electron microscopy and transmission electron microscopy. Various gases with variable concentrations were used to test the sensing properties and selectivity of the gas sensors at different operating temperatures. Based on the operating temperatures within a range of 350-400°C, the SnO2 and WO3 gas sensors were found to exhibit good response to alcohol and hydrogen, respectively. Doping CNT in SnO2 and WO3 dramatically improves the sensitivity and selectivity of the gas sensors. Moreover, CNT can reduce the operating temperature (from around 350-400°C to 250°C) leading to reduction in power consumption which is one of the major problems for metal oxide gas sensor. The sensing mechanism of these gas sensors will be demonstrated.
AB - Electron beam (E-beam) evaporation process offers extensive possibilities for controlling film structure and morphology with desired properties such as dense coating, high thermal efficiency, low contamination, high reliability and high productivity. In this work, we have applied the E-beam process to fabricate nanostructured gas sensors, i.e., WO3, SnO2, CNT-WO 3, CNT-SnO2. The nanostructure sensing elements were characterized by scanning electron microscopy and transmission electron microscopy. Various gases with variable concentrations were used to test the sensing properties and selectivity of the gas sensors at different operating temperatures. Based on the operating temperatures within a range of 350-400°C, the SnO2 and WO3 gas sensors were found to exhibit good response to alcohol and hydrogen, respectively. Doping CNT in SnO2 and WO3 dramatically improves the sensitivity and selectivity of the gas sensors. Moreover, CNT can reduce the operating temperature (from around 350-400°C to 250°C) leading to reduction in power consumption which is one of the major problems for metal oxide gas sensor. The sensing mechanism of these gas sensors will be demonstrated.
KW - CNT
KW - E-beam
KW - Gas sensor
KW - Metal Oxide
KW - SnO
KW - WO
UR - https://www.scopus.com/pages/publications/79961224462
U2 - 10.1109/ECTICON.2011.5947757
DO - 10.1109/ECTICON.2011.5947757
M3 - Conference contribution
AN - SCOPUS:79961224462
SN - 9781457704246
T3 - ECTI-CON 2011 - 8th Electrical Engineering/ Electronics, Computer, Telecommunications and Information Technology (ECTI) Association of Thailand - Conference 2011
SP - 10
EP - 13
BT - ECTI-CON 2011 - 8th Electrical Engineering/ Electronics, Computer, Telecommunications and Information Technology (ECTI) Association of Thailand - Conference 2011
T2 - 8th Electrical Engineering/ Electronics, Computer, Telecommunications and Information Technology (ECTI) Association of Thailand - Conference 2011, ECTI-CON 2011
Y2 - 17 May 2011 through 19 May 2011
ER -