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Fabrication of micropattern grating platform for sensing bio-molecule interaction

  • Naphat Chathirat
  • , Nithi Atthi
  • , Charndet Hruanun
  • , Amporn Poyai
  • , Tanakorn Osotchan
  • , Somsak Dangtip

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Device consisting of a micro-pattern grating structure with membrane of alternating dielectric materials such as SiO2, Si3N 4 and SOG or ITO, is fabricated. Its utilization as a platform for attaching active silane layer such as APTES, further as a sensor after immobilizing of sensing molecules and hybridizing with complimentary molecules is demonstrated. Shifting in peak wavelength is observed when new layer is introduced onto the platform.

Original languageEnglish
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages241-244
Number of pages4
DOIs
Publication statusPublished - 2010
Event5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
Duration: 20 Jan 2010 → 23 Jan 2010

Publication series

Name2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Conference

Conference5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/TerritoryChina
CityXiamen
Period20/01/10 → 23/01/10

Keywords

  • Bio-molecule
  • Grating
  • Micropattern
  • Peak wavelength shift
  • Sensor fabrication

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